Compositionally matched nitrogen-doped Ge2Sb2Te5/Ge2Sb2Te5 superlattice-like structures for phase change random access memory

superlattice-like structures for phase change random access memory Chun Chia Tan, Luping Shi, Rong Zhao, Qiang Guo, Yi Li, Yi Yang, Tow Chong Chong, Jonathan A. Malen, Wee-Liat Ong, Tuviah E. Schlesinger, and James A. Bain Data Storage Institute, A*STAR (Agency for Science, Technology and Research), DSI Building, 5 Engineering Drive 1, Singapore 117608 Department of Electrical and Computer Engineering, Carnegie Mellon University, 5000 Forbes Avenue, Pittsburgh, Pennsylvania 15213-3890, USA Optical Memory National Engineering Research Center, Department of Precision Instrument, Tsinghua University, Beijing 100084, China Singapore University of Technology & Design, 20 Dover Drive, Singapore 138682 State Key Laboratory of Metal Matrix Composites, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai 200240, People’s Republic of China Department of Material Science and Engineering, National University of Singapore, 7 Engineering Drive 1, Singapore 117576 Department of Mechanical Engineering, Carnegie Mellon University, Pittsburgh, 5000 Forbes Avenue, Pittsburgh, Pennsylvania 15213-3890, USA